Zyulkov, IvanIvanZyulkovMadhivala, VirajVirajMadhivalaVoronina, EkaterinaEkaterinaVoroninaSnelgrove, MatthewMatthewSnelgroveBogan, JustinJustinBoganO'Connor, RobRobO'ConnorDe Gendt, StefanStefanDe GendtArmini, SilviaSilviaArmini2021-10-292021-10-2920201944-8244https://imec-publications.be/handle/20.500.12860/36424Area-selective ALD of Ru on nanometer-scale Cu lines through dimerization of amino-functionalized alkoxy silane passivation filmsJournal article10.1021/acsami.9b14596