FEM study of deformation and stresses in copper wire bonds on Cu lowK structures during processing

Degryse, DominiekDominiekDegryseVandevelde, BartBartVandeveldeBeyne, EricEricBeyne2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8823FEM study of deformation and stresses in copper wire bonds on Cu lowK structures during processingProceedings paper