Comparative analysis of the factors leading to low-k degradation during the integration process

Zotovich, AlexeyAlexeyZotovichKrishtab, MikhailMikhailKrishtabLazzarino, FredericFredericLazzarinoBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24900Comparative analysis of the factors leading to low-k degradation during the integration processMeeting abstract