The role of nitrogen in HfSiON defect passivation

O'Connor, RobertRobertO'ConnorAoulaiche, MarcMarcAoulaichePantisano, LuigiLuigiPantisanoShickova, AdelinaAdelinaShickovaDegraeve, RobinRobinDegraeveKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-182009-04https://imec-publications.be/handle/20.500.12860/15937The role of nitrogen in HfSiON defect passivationProceedings paper