Witvrouw, AnnAnnWitvrouwMehta, AnshuAnshuMehtaVerbist, AgnesAgnesVerbistDu Bois, BertBertDu BoisVan Aerde, StevenStevenVan AerdeRamos-Martos, J.J.Ramos-MartosCeballos, J.J.CeballosRagel, A.A.RagelMora, J.M.J.M.MoraLagos, M.A.M.A.LagosArias, A.A.AriasHinojosa, J.M.J.M.HinojosaSpengler, J.J.SpenglerLeinenbach, C.C.LeinenbachFuchs, T.T.FuchsKronmüller, S.S.Kronmüller2021-10-162021-10-162005-02https://imec-publications.be/handle/20.500.12860/11568Processing of MEMS gyroscopes on top of CMOS ICsProceedings paper