Toward extending the capabilties of scanning spreading resistance microscopy for fin field-effect-transistor-based structures

Mody, JayJayModyEyben, PierrePierreEybenAugendre, EmmanuelEmmanuelAugendreRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-1720081071-1023https://imec-publications.be/handle/20.500.12860/14178Toward extending the capabilties of scanning spreading resistance microscopy for fin field-effect-transistor-based structuresJournal article