Maes, HermanHermanMaesDegraeve, RobinRobinDegraeveNigam, TanyaTanyaNigamDe Blauwe, JanJanDe BlauweGroeseneken, GuidoGuidoGroeseneken2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3644Reliability of ultra-thin dielectrics for giga scale silicon technologiesProceedings paper