Study of damage caused by non-reactive Ar plasma on an organic low-k material

de Marneffe, Jean-FrancoisJean-Francoisde MarneffeLjazouli, RamiRamiLjazouliSouriau, LaurentLaurentSouriauZhang, LipingLipingZhangWilson, ChrisChrisWilsonBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20550Study of damage caused by non-reactive Ar plasma on an organic low-k materialMeeting abstracthttp://pesm2012.insight-outside.fr