Structural characterization of ALCVD ZrO2/Al2O3 nano-laminate deposits with high temperature grazing incidence XRD and TEM

Zhao, ChaoChaoZhaoRichard, OlivierOlivierRichardMaes, JosJosMaesRoebben, G.G.RoebbenBender, HugoHugoBenderDe Gendt, StefanStefanDe GendtCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeynsVan Der Biest, O.O.Van Der Biest2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7099Structural characterization of ALCVD ZrO2/Al2O3 nano-laminate deposits with high temperature grazing incidence XRD and TEMOral presentation