Charge injection and storage in single-layer and multilayer electrets based on SiO2 and Si3N4

Leonov, VladimirVladimirLeonovVan Hoof, ChrisChrisVan HoofGoedbloed, MartijnMartijnGoedbloedvan Schaijk, RobRobvan Schaijk2021-10-202021-10-2020121070-9878https://imec-publications.be/handle/20.500.12860/21003Charge injection and storage in single-layer and multilayer electrets based on SiO2 and Si3N4Journal article