Airgap Integration in MP18 Two-Level Semi-damascene Interconnects with Fully Self-aligned Vias

Delie, GillesGillesDelieMurdoch, GayleGayleMurdochMarti, GiulioGiulioMartiGupta, AnshulAnshulGuptaWu, ChenChenWuLesniewska, AlicjaAlicjaLesniewskaGavrilov, AntonAntonGavrilovCiofi, IvanIvanCiofiKundu, SouvikSouvikKunduDecoster, StefanStefanDecosterPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2025-06-052025-03-062025-06-052024979-8-3503-8518-22380-632XWOS:001411360600047https://imec-publications.be/handle/20.500.12860/45337Airgap Integration in MP18 Two-Level Semi-damascene Interconnects with Fully Self-aligned ViasProceedings paper10.1109/IITC61274.2024.10732649979-8-3503-8517-5WOS:001411360600047