Demuynck, StevenStevenDemuynckHuffman, CraigCraigHuffmanClaes, MartineMartineClaesSuhard, SamuelSamuelSuhardVersluijs, JankoJankoVersluijsVolders, HennyHennyVoldersHeylen, NancyNancyHeylenKellens, KristofKristofKellensCroes, KristofKristofCroesStruyf, HerbertHerbertStruyfVereecke, GuyGuyVereeckeVerdonck, PatrickPatrickVerdonckDe Roest, DavidDavidDe RoestBeynet, JulienJulienBeynetSprey, HesselHesselSpreyBeyer, GeraldGeraldBeyer2021-10-182021-10-1820100021-4922https://imec-publications.be/handle/20.500.12860/17009Integration and dielectric reliability of 30nm ½ pitch structures in Aurora® LK HMJournal article