Rooyackers, RitaRitaRooyackersVandooren, AnneAnneVandoorenVerhulst, AnneAnneVerhulstWalke, A.A.WalkeDevriendt, KatiaKatiaDevriendtLocorotondo, SabrinaSabrinaLocorotondoDemand, MarcMarcDemandBryce, GeorgeGeorgeBryceLoo, RogerRogerLooHikavyy, AndriyAndriyHikavyyVandeweyer, TomTomVandeweyerHuyghebaert, CedricCedricHuyghebaertCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23015A new complementary hetero-junction vertical tunnel-FET integration schemeProceedings paper