Janssens, StoffelStoffelJanssensDrijkoningen, SienSienDrijkoningenHaenen, KenKenHaenen2021-10-222021-10-2220140003-6951https://imec-publications.be/handle/20.500.12860/24002Ultra-thin nanocrystalline diamond membranes as pressure sensors for harsh environmentsJournal articlehttp://scitation.aip.org/content/aip/journal/apl/104/7/10.1063/1.4866028