Goethals, MiekeMiekeGoethalsJaenen, PatrickPatrickJaenenPollers, IngridIngridPollersVan Roey, FriedaFriedaVan RoeyRonse, KurtKurtRonseHeskamp, B.B.HeskampDavies, G.G.Davies2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3466Recent advancements in 193 nm step and scan lithographyJournal article