Critical material properties for pattern collapse mitigation

Winroth, GustafGustafWinrothYounkin, Todd R.Todd R.YounkinBlackwell, James M.James M.BlackwellGronheid, RoelRoelGronheid2021-10-202021-10-2020121537-1646https://imec-publications.be/handle/20.500.12860/21854Critical material properties for pattern collapse mitigationJournal article