Gronheid, RoelRoelGronheidYounkin, ToddToddYounkinLeeson, MichaelMichaelLeesonFonseca, CarlosCarlosFonsecaHooge, JoshuaJoshuaHoogeNafus, KathleenKathleenNafusBiafore, JohnJohnBiaforeSmith, Mark D.Mark D.Smith2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19016EUV secondary electron blur at the 22nm half pitch nodeProceedings paper