Swerts, JohanJohanSwertsWen, Liang GongLiang GongWenDelabie, AnneliesAnneliesDelabiePhung, QuanQuanPhungBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokeiVan Elshocht, SvenSvenVan Elshocht2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23141Ruthenium nanowires by selective atomic layer depositionMeeting abstract