Automatic generation of shallow electrically active dopant profiles from spreading resistance measurements

Clarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/85Automatic generation of shallow electrically active dopant profiles from spreading resistance measurementsJournal article