Fallica, RobertoRobertoFallicaChen, StevenStevenChenDe Simone, DaniloDaniloDe SimoneSuh, Hyo SeonHyo SeonSuh2022-12-212022-10-292022-11-032022-12-2120221932-5150WOS:000867486800008https://imec-publications.be/handle/20.500.12860/40630Adhesion and collapse of extreme ultraviolet photoresists and the role of underlayersJournal article10.1117/1.JMM.21.3.034601WOS:000867486800008INTERFACIAL-TENSIONSURFACEEUVDEVELOPERFORCESENERGY