Vos, RitaRitaVosXu, KaidongKaidongXuLux, MarcelMarcelLuxFyen, WimWimFyenSingh, R.R.SinghChen, Zhi YongZhi YongChenMertens, PaulPaulMertensHatcher, Z.Z.HatcherHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5824Use of surfactants for improved particle performance of dHF-based cleaning recipesProceedings paper