Using chemo-epitaxial directed self-assembly for repair and frequency multiplication of EUVL contact-hole patterns

Singh, ArjunArjunSinghParnell, DoniDoniParnellChan, BTBTChanGronheid, RoelRoelGronheid2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24533Using chemo-epitaxial directed self-assembly for repair and frequency multiplication of EUVL contact-hole patternsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1857190