Marinissen, Erik JanErik JanMarinissenGuillou, YannYannGuillouVan der Plas, GeertGeertVan der Plas2021-10-182021-10-1820090740-7475https://imec-publications.be/handle/20.500.12860/15829DATE 2009 workshop on 3D integrationJournal articlehttp://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5167511&isnumber=5167496