Sakajiri, KyoheiKyoheiSakajiriTritchkov, AlexanderAlexanderTritchkovGranik, YuriYuriGranikHendrickx, EricEricHendrickxVandenberghe, GeertGeertVandenbergheKempsell, MonicaMonicaKempsellFenger, GermainGermainFengerBoehm, KlausKlausBoehmScheruebl, ThomasThomasScheruebl2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16150Application of pixel-based mask optimization technique for high-transmission attenuated PSMProceedings paper