Pacco, AntoineAntoinePaccoAkanishi, YuyaYuyaAkanishiMurdoch, GayleGayleMurdochLe, Quoc ToanQuoc ToanLeHolsteyns, FrankFrankHolsteyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33718Controlled cobalt recess for advanced interconnect metallizationProceedings paper