In-line ambient impurity measurement of a rapid thermal process chamber by using atmospheric pressure ionization mass spectrometer

Kondoh, EiichiEiichiKondohVereecke, GuyGuyVereeckeHeyns, MarcMarcHeynsMaex, KarenKarenMaexGutt, T.T.GuttNényei, Z.Z.Nényei2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2679In-line ambient impurity measurement of a rapid thermal process chamber by using atmospheric pressure ionization mass spectrometerProceedings paper