Thermoelectric microsensor based on ultrathin Si films

Gonçalves Dalkiranis, GustavoGustavoGonçalves DalkiranisFerrando Villalba, PabloPabloFerrando VillalbaLopeandía-Fernández, AitorAitorLopeandía-FernándezAbad-Munoz, LlibertatLlibertatAbad-MunozRodríguez-Viejo, JavierJavierRodríguez-Viejo2021-10-252021-10-252018-12https://imec-publications.be/handle/20.500.12860/30779Thermoelectric microsensor based on ultrathin Si filmsProceedings paperhttp://www.mdpi.com/2504-3900/2/13/1517/pdf