Carbon nanotubes grown in contact holes for nano electronic applications: how to prepare TEM samples by FIB?

Ke, XiaoxingXiaoxingKeBals, SaraSaraBalsRomo Negreira, AinhoaAinhoaRomo NegreiraHantschel, ThomasThomasHantschelBender, HugoHugoBenderVan Tendeloo, GustaafGustaafVan Tendeloo2021-10-172021-10-172008-09https://imec-publications.be/handle/20.500.12860/13943Carbon nanotubes grown in contact holes for nano electronic applications: how to prepare TEM samples by FIB?Proceedings paper