Radiation damage studies of strain-engineered and high-mobility deep submicrometer MOSFETs

Simoen, EddyEddySimoenPut, SofieSofiePutVan Uffelen, NickNickVan UffelenLeroux, P.P.LerouxClaeys, CorCorClaeysOhyama, H.H.OhyamaKulkarni, R.R.KulkarniSchrimpf, R.D.R.D.SchrimpfGalloway, K.F.K.F.Galloway2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14478Radiation damage studies of strain-engineered and high-mobility deep submicrometer MOSFETsOral presentation