Ito, ChikashiChikashiItoDurant, StephaneStephaneDurantLange, SteveSteveLangeHarukawa, RyotaRyotaHarukawaMiyagi, TakemasaTakemasaMiyagiNagaswami, VenkatVenkatNagaswamiRincon Delgadillo, PaulinaPaulinaRincon DelgadilloGronheid, RoelRoelGronheidNealey, PaulPaulNealey2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23990Inspection of directed self assembly defectsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1857188