A novel simple method to extract the effective LDD doping concentration on fully depleted SOI nMOSFET

Nicolett, A. S.A. S.NicolettMartino, Joao AntonioJoao AntonioMartinoSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3701A novel simple method to extract the effective LDD doping concentration on fully depleted SOI nMOSFETOral presentation