SILC defect generation spectroscopy in HfSiON using constant voltage stress and substrate hot electron injection

O'Connor, RobertRobertO'ConnorPantisano, LuigiLuigiPantisanoDegraeve, RobinRobinDegraeveKauerauf, ThomasThomasKaueraufKaczer, BenBenKaczerRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroeseneken2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14238SILC defect generation spectroscopy in HfSiON using constant voltage stress and substrate hot electron injectionProceedings paper