Quasi 2D epitaxial Si-O superlattices: growth, device performance and defect analysis

Jayachandran, SuseendranSuseendranJayachandranMartens, KoenKoenMartensSimoen, EddyEddySimoenCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeynsDelabie, AnneliesAnneliesDelabie2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26783Quasi 2D epitaxial Si-O superlattices: growth, device performance and defect analysisMeeting abstracthttps://mrsspring.zerista.com/event/member/243732