Shamiryan, DenisDenisShamiryanParaschiv, VasileVasileParaschivEslava Fernandez, SalvadorSalvadorEslava FernandezDemand, MarcMarcDemandBaklanov, MikhaïlMikhaïlBaklanovBeckx, StephanStephanBeckxBoullart, WernerWernerBoullart2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12884Profile control of novel non-Si gates using BCl3/N2 plasmaJournal article