CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities

Hermans, ArturArturHermansVan Daele, MichielMichielVan DaeleKieninger, ClemensClemensKieningerDendooven, JolienJolienDendoovenClemmen, StephaneStephaneClemmenDetavernier, ChristopheChristopheDetavernierKoos, ChristianChristianKoosBaets, RoelRoelBaets2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28489CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalitiesProceedings paperhttps://doi.org/10.1364/CLEO_SI.2017.SM3K.3