Cleaning and etching solutions for the prospective use of Molybdenum in next generation interconnect fabrication.

Pacco, AntoineAntoinePaccoLe, Quoc ToanQuoc ToanLeAkanishi, YuyaYuyaAkanishiAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35695Cleaning and etching solutions for the prospective use of Molybdenum in next generation interconnect fabrication.Meeting abstracthttps://www.web-events.net/doc/users/840/bib/globalprogramvf.pdf