Investigation of Self-Assembled Monolayers (SAM) for Advanced Interconnects Schemes

Sun, YitingYitingSun2021-10-242021-10-242017-06https://imec-publications.be/handle/20.500.12860/29525Investigation of Self-Assembled Monolayers (SAM) for Advanced Interconnects SchemesPHD thesishttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1725113&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US&fromSitemap=1