Rudra, SukumarSukumarRudraVan Hoof, RitaRitaVan HoofDe Coster, JeroenJeroenDe CosterBryce, GeorgeGeorgeBryceSeveri, SimoneSimoneSeveriWitvrouw, AnnAnnWitvrouwVan Thourhout, DriesDriesVan Thourhout2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/23023A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuatorJournal article