De Wolf, IngridIngridDe WolfCzarnecki, PiotrPiotrCzarneckiJourdain, AnneAnneJourdainKalicinski, StanislawStanislawKalicinskiModlinski, RobertRobertModlinskiMuller, PhilippePhilippeMullerRottenberg, XavierXavierRottenbergSoussan, PhilippePhilippeSoussanTilmans, HarrieHarrieTilmans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10337Failure mechanisms and reliability issues of RF-MEMS switchesProceedings paper