Nuytten, ThomasThomasNuyttenKosemura, DaisukeDaisukeKosemuraBogdanowicz, JanuszJanuszBogdanowiczWitters, LiesbethLiesbethWittersEneman, GeertGeertEnemanHantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeFavia, PaolaPaolaFaviaBender, HugoHugoBenderDe Wolf, IngridIngridDe WolfVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27085Stress measurements in semiconductor devices using nano-focused Raman spectroscopyProceedings paper