Siew, Yong KongYong KongSiewJourdan, NicolasNicolasJourdanBarbarin, YohanYohanBarbarinMachillot, JeromeJeromeMachillotDemuynck, StevenStevenDemuynckCroes, KristofKristofCroesTseng, J.J.TsengAi, HuaHuaAiTang, JingJingTangNaik, M.M.NaikWang, P.P.WangNarasimhan, M.M.NarasimhanAbraham, M.M.AbrahamCockburn, AndrewAndrewCockburnBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23080CVD Mn-based self-formed barrier for advanced interconnect technologyProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6615551&contentType=Conference+Publications