Vanpaemel, JohannesJohannesVanpaemelMasahito, SugiuraSugiuraMasahitoBarbarin, YohanYohanBarbarinDe Gendt, StefanStefanDe GendtTokei, ZsoltZsoltTokeiVereecken, PhilippePhilippeVereeckenvan der Veen, MarleenMarleenvan der Veen2021-10-222021-10-2220140167-9317https://imec-publications.be/handle/20.500.12860/24743Growth and integration challenges for carbon nanotubes interconnectsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931713006199