Shirotori, AkihideAkihideShirotoriHoshino, ManabuManabuHoshinoRathore, AshishAshishRathoreFu, Yeh SinYeh SinFuDe Simone, DaniloDaniloDe SimoneVandenberghe, GeertGeertVandenbergheMatsumoto, HirokazuHirokazuMatsumoto2023-06-152022-09-102023-06-152022978-1-5106-4985-90277-786XWOS:000844546500013https://imec-publications.be/handle/20.500.12860/40416Improved resolution with main chain scission resists for EUV lithographyProceedings paper10.1117/12.2613445978-1-5106-4986-6WOS:000844546500013