An insight into the parasitic capacitances of SOI and bulk FinFET devices

Griffoni, AlessioAlessioGriffoniThijs, StevenStevenThijsLinten, DimitriDimitriLintenScholz, MirkoMirkoScholzGroeseneken, GuidoGuidoGroesenekenMeneghesso, GaudenzioGaudenzioMeneghesso2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15398An insight into the parasitic capacitances of SOI and bulk FinFET devicesProceedings paper