Fabrication and characterization of epitaxial Si-O superlattices

Jayachandran, SuseendranSuseendranJayachandranDelabie, AnneliesAnneliesDelabieLin, DennisDennisLinDouhard, BastienBastienDouhardRichard, OlivierOlivierRichardMeersschaut, JohanJohanMeersschautMoussa, AlainAlainMoussaBender, HugoHugoBenderCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeyns2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24006Fabrication and characterization of epitaxial Si-O superlatticesMeeting abstracthttp://www.emrs-strasbourg.com/index.php?option=com_abstract&task=view&id=276&day=2014-09-15&year=2014&Itemid=&id_season=12