Baehr, MarioMarioBaehrKaepplinger, IndiraIndiraKaepplingerPobedinskas, PauliusPauliusPobedinskasFrank, ThomasThomasFrankGruen, AndreAndreGruenHaenen, KenKenHaenenOrtlepp, ThomasThomasOrtlepp2023-05-162022-11-102023-05-1620231862-6300WOS:000874117400001https://imec-publications.be/handle/20.500.12860/40706Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond LayerJournal article10.1002/pssa.202200309WOS:000874117400001MICROWAVEFILMSCVDSUBSTRATE