Linear arrays of poly SiGe uncolled microbolometers with CMOS readout as long wavelength infrared sensors

Kavadias, SpyrosSpyrosKavadiasDe Moor, PietPietDe MoorGastal, MartinMartinGastalVan Hoof, ChrisChrisVan Hoof2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4465Linear arrays of poly SiGe uncolled microbolometers with CMOS readout as long wavelength infrared sensorsOral presentation