Composition measurements of thin films beyond the spatial resolution of SIMS

Franquet, AlexisAlexisFranquetDouhard, BastienBastienDouhardDelmotte, JorisJorisDelmotteMerckling, ClementClementMercklingConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22368Composition measurements of thin films beyond the spatial resolution of SIMSMeeting abstract