Bogdanowicz, JanuszJanuszBogdanowiczFolkersma, StevenStevenFolkersmaSchulze, AndreasAndreasSchulzeMoussa, AlainAlainMoussaMerckling, ClementClementMercklingKunert, BernardetteBernardetteKunertGuo, WeimingWeimingGuoPetersen, DirchDirchPetersenWitthoft, Maria-LouiseMaria-LouiseWitthoftHansen, OleOleHansenHenrichsen, HenrikHenrikHenrichsenNielsen, PeterPeterNielsenVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27875In-line sheet resistance measurements of nanometer-wide semiconducting finsProceedings paper