Norris, D.J.D.J.NorrisWalther, T.T.WaltherCullis, A.G.A.G.CullisMyronov, M.M.MyronovDobbie, A.A.DobbieWhall, T.T.WhallParker, E.H.C.E.H.C.ParkerLeadley, D.R.D.R.LeadleyDe Jaeger, BriceBriceDe JaegerLee, WillieWillieLeeMeuris, MarcMarcMeurisWatling, J.J.WatlingAsenov, A.A.Asenov2021-10-182021-10-1820101742-6588https://imec-publications.be/handle/20.500.12860/17710TEM analysis of Ge-on-Si MOSFET structures with HfO2 dielectric for high performance PMOS device technologyJournal article